跳到主要内容

SnFn

S1 - Tool Status​

S1F1 S1F2 S1F3 S1F4 S1F5 S1F6 S1F7 S1F8 S1F9 S1F10 S1F11 S1F12 S1F13 S1F14 S1F15 S1F16 S1F17 S1F18 S1F19 S1F20 S1F21 S1F22 S1F23 S1F24

S2 - Tool Control & Diagnostics​

S2F1 S2F2 S2F3 S2F4 S2F5 S2F6 S2F7 S2F8 S2F9 S2F10 S2F11 S2F12 S2F13 S2F14 S2F15 S2F16 S2F17 S2F18 S2F19 S2F20 S2F21 S2F22 S2F23 S2F24 S2F25 S2F26 S2F27 S2F28 S2F29 S2F30 S2F31 S2F32 S2F33 S2F34 S2F35 S2F36 S2F37 S2F38 S2F39 S2F40 S2F41 S2F42 S2F43 S2F44 S2F45 S2F46 S2F47 S2F48 S2F49 S2F50 S2F51 S2F52 S2F53 S2F54 S2F55 S2F56 S2F57 S2F58 S2F59 S2F60 S2F61 S2F62 S2F63 S2F64

S3 - Material Status​

S3F1 S3F2 S3F3 S3F4 S3F5 S3F6 S3F7 S3F8 S3F9 S3F10 S3F11 S3F12 S3F13 S3F14 S3F15 S3F16 S3F17 S3F18 S3F19 S3F20 S3F21 S3F22 S3F23 S3F24 S3F25 S3F26 S3F27 S3F28 S3F29 S3F30 S3F31 S3F32 S3F33 S3F34 S3F35 S3F36

S4 - Material Control​

S5 - Exception Handling​

S6 - Data Collection​

S7 - Process Program Management​

S8 - Control Prog Xfer​

S9 - Errors​

S10 - Terminal Services​

S11 - (Deleted)​

S12 - Wafer Maps​

S13 - Dataset Transfers​

S14 - Object Services​

S15 - Recipe Management​

S16 - Processing Management​

S18 - Subsystem Management​

S17 - Per Module Reports/Event Tracing​

S19 - Recipes & Parameters​

S20 - E170 Recipe Management​

S21 - Item Transfer​

编辑此页​

有任何问题或疑问，请发送邮件到--->admin@secs-ii.net
  • 发现错误或表达不清希望修正
  • 内容不健全需要扩展
  • 有疑问希望解答